SGM 1200℃上開(kāi)門(mén)真空井式坩堝爐是由洛陽(yáng)西格馬高溫電爐小型實(shí)驗(yàn)坩堝爐。
西格馬小型真空坩堝爐集控制系統(tǒng)與爐膛一體，其中爐膛保溫材料采用陶瓷纖維真空吸附成型，加熱元件采用質(zhì)硅鉬棒。超大口徑的石英爐腔和真空密封法蘭系統(tǒng)，可在流動(dòng)氣氛和真空狀態(tài)下快速加熱樣品。主要用于煅燒真空或惰性氣體中的高純度化合物，退火或擴(kuò)散半導(dǎo)體晶片；也可用于烘燒或燒結(jié)陶瓷材料。
Sigma small vacuum crucible furnace integrates control system and furnace. Ceramic fiber vacuum absorption molding is used as furnace insulation material, and high-quality silicon molybdenum rod is used as heating element. The ultra large diameter quartz furnace chamber and vacuum sealing flange system can quickly heat the sample in flowing atmosphere and vacuum. It is mainly used for calcining high-purity compounds in vacuum or inert gas, annealing or diffusion of semiconductor wafers, and can also be used for baking or sintering ceramic materials.
主要特點(diǎn)Main features:
集控制系統(tǒng)與爐膛為一體
Integrated control system and furnace
高品質(zhì)慘鉬鐵鉻鋁合金作為加熱元件，可加熱到1100℃
High quality Mo Fe Cr Al alloy can be heated to 1100 ℃
爐膛保溫材料采用整體真空吸附成型，節(jié)能環(huán)保
The furnace insulation material adopts the whole vacuum adsorption molding, which is energy-saving and environmental protection
大口徑的石英爐腔和真空密封法蘭系統(tǒng)，可以在流動(dòng)氣氛和真空狀態(tài)下快速加熱樣品
The large diameter quartz furnace chamber and vacuum sealing flange system can quickly heat the sample in flowing atmosphere and vacuum
內(nèi)置30段可編程精密數(shù)字溫度控制器可控制升降溫速率
The built-in 30 segment programmable precision digital temperature controller can control the temperature rise and fall rate
技術(shù)參數(shù)Technical Parameters
電爐名稱(chēng)
name
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上開(kāi)門(mén)真空井式坩堝爐
Vacuum well crucible furnace with front door
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開(kāi)門(mén)方式
open
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上開(kāi)門(mén)
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Working Temperature
工作溫度
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Max. Temperature: 1200?°C ( 1 hr)
額定溫度：1200℃ (1小時(shí))
Continuous working temperature:?≤1100℃
持續(xù)工作溫度：≤1100℃
Max.?heating Rate:?≤15°C /min
設(shè)計(jì)快升溫速率：≤40℃/分
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Temperature Controller
控溫方式
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PID automatic control and?auto-tune function.
模糊PID控制和自整定調(diào)節(jié)
30 programmable segments for precise thermal processing.
智能化30段可編程控制
Built-in protection for the over-heated and broken thermocouple.?
超溫和斷偶報(bào)警功能
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Heating Elements
加熱元件
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Resistance wire, Fe-Cr-Al Alloy doped by Mo
電阻絲（摻鉬鐵鉻鋁合金）
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Temperature Accuracy
控溫精度
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+/- 1℃
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Chamber size爐膛有效尺寸
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Φ210*340mm
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Dimensions
尺寸
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Furnace size:?510*435*425mm(L*W*H )
爐子尺寸：510*435*425mm(長(zhǎng)*寬*高?)
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Net Weight
凈重
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70kg
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Shipping Weight
毛重
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100kg
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Vacuum Flange
真空法蘭
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Special designed?flanges
定制法蘭
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Vacuum Pressure
真空壓力
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133torr can be achieved by mechanical pump
機(jī)械泵可達(dá)133torr（1pa）
10^-5 torr can be reached by molecular pump
分子泵可達(dá)10^-5torr（10^-3pa）
Please click the picture below to order vacuum parts
點(diǎn)擊下列圖片訂購(gòu)真空部件
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Power
輸入電源
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Power rated:?3KW
額定功率：3KW
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Voltage
電壓
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Voltage rated:??AC220V 50/60HZ
額定電壓：?AC220V 50/60HZ
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Warranty
質(zhì)保
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Two year limited warranty with lifetime support ?(Such consumable parts as tO-rings, etc. are NOT?supported?by the warranty)
二年質(zhì)保終身支持（消耗品如O型圈等不在質(zhì)保范圍內(nèi)）
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Warning
注意事項(xiàng)
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Small cracks may appear on the surface of the refractory ceramics over extended use. This is a normal occurrence and the cracks may be repaired with?alumina coating.
在使用過(guò)程中爐膛表面可能出現(xiàn)細(xì)小裂紋。這是正常情況，裂紋可以用氧化鋁涂層修復(fù)。
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??售前客服